International Chemical Safety Cards TETRAFLUOROSILANE ICSC: 0576 Silicon tetrafluoride Silicon fluoride Perfluorosilane SiF4 Molecular mass: 104.1 (cylinder) ICSC #    0576 CAS #     7783-61-1 RTECS # VW2327000 UN #        1859 April 07, 1997 Peer reviewed TYPES OF HAZARD/ EXPOSURE ACUTE HAZARDS/ SYMPTOMS PREVENTION FIRST AID/ FIRE FIGHTING FIRE Not combustible. Gives off irritating or toxic fumes (or gases) in a fire. NO water. In case of fire in the surroundings: powder, carbon dioxide. EXPLOSION In case of fire: cool cylinder by spraying with water but avoid contact of the substance with water. EXPOSURE AVOID ALL CONTACT!  •INHALATION Sore throat. Cough. Burning sensation. Shortness of breath. Laboured breathing. Symptoms may be delayed (see Notes). Ventilation, local exhaust, or breathing protection. Fresh air, rest. Half-upright position. Refer for medical attention.  •SKIN Redness. ON CONTACT WITH LIQUID: FROSTBITE. Cold-insulating gloves. Protective clothing. Rinse skin with plenty of water or shower. Refer for medical attention.  •EYES Redness. Safety goggles, or eye protection in combination with breathing protection. First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor.  •INGESTION SPILLAGE DISPOSAL STORAGE PACKAGING & LABELLING Evacuate danger area! Consult an expert! Ventilation (extra personal protection: chemical protection suit including self-contained breathing apparatus). Fireproof. Keep in a well-ventilated room. Do not transport with food and feedstuffs. R: S: UN Hazard Class: 2.3 UN Subsidiary Risks: 8 SEE IMPORTANT INFORMATION ON BACK ICSC: 0576 Prepared in the context of cooperation between the International Programme on Chemical Safety & the Commission of the European Communities (C) IPCS CEC 1994. No modifications to the International version have been made except to add the OSHA PELs, NIOSH RELs and NIOSH IDLH values.

International Chemical Safety Cards TETRAFLUOROSILANE ICSC: 0576 I M P O R T A N T D A T A PHYSICAL STATE; APPEARANCE: COLOURLESS GAS , WITH PUNGENT ODOUR. PHYSICAL DANGERS: The gas is heavier than air. CHEMICAL DANGERS: The substance decomposes on heating producing toxic and corrosive fumes including hydrogen fluoride (see ICSC 0283). Reacts with water to form hydrogen fluoride and silicic acid. Attacks many metals in presence of water releasing hydrogen. OCCUPATIONAL EXPOSURE LIMITS: TLV (as F (Fluorides)): ppm; 2.5 mg/m3 (ACGIH 1996). TLV not established. ROUTES OF EXPOSURE: The substance can be absorbed into the body by inhalation. INHALATION RISK: A harmful concentration of this gas in the air will be reached very quickly on loss of containment. EFFECTS OF SHORT-TERM EXPOSURE: The substance is corrosive to the eyes, the skin and the respiratory tract. Inhalation of this gas may cause lung oedema (see Notes). The effects may be delayed. Medical observation is indicated. EFFECTS OF LONG-TERM OR REPEATED EXPOSURE: PHYSICAL PROPERTIES Sublimation point: -95.7°C Solubility in water: reaction Relative vapour density (air = 1): 3.6 ENVIRONMENTAL DATA N O T E S The symptoms of lung oedema often do not become manifest until a few hours have passed and they are aggravated by physical effort. Rest and medical observation are therefore essential. Immediate administration of an appropriate spray, by a doctor or a person authorized by him/her, should be considered. NFPA Code: H3; F0; R2; W ADDITIONAL INFORMATION ICSC: 0576 TETRAFLUOROSILANE (C) IPCS, CEC, 1994

IMPORTANT LEGAL NOTICE: Neither NIOSH, the CEC or the IPCS nor any person acting on behalf of NIOSH, the CEC or the IPCS is responsible for the use which might be made of this information. This card contains the collective views of the IPCS Peer Review Committee and may not reflect in all cases all the detailed requirements included in national legislation on the subject. The user should verify compliance of the cards with the relevant legislation in the country of use. The only modifications made to produce the U.S. version is inclusion of the OSHA PELs, NIOSH RELs and NIOSH IDLH values.